Tilted structures to reduce reflection in laser-assisted TAMR

ABSTRACT

A TAMR (Thermal Assisted Magnetic Recording) write head uses the energy of optical-laser excited surface plasmons in a plasmon generator to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. The optical radiation is transmitted to the plasmon generator by means of a waveguide, whose optical axis (centerline) is tilted relative to either or both the backside surface normal and ABS surface normal in order to eliminate back reflections of the optical radiation that can adversely affect the properties and performance of the laser. Variations of the disclosure include tilting the plasmon generator, the waveguide and the laser diode.

This is a Divisional Application of U.S. patent application Ser. No.13/778,983 filed on Feb. 27, 2013, which is herein incorporated byreference in its entirety and assigned to a common assignee.

BACKGROUND

1. Technical Field

This invention relates to magnetic read/write heads that employ TAMR(thermally assisted magnetic recording) using laser energy to heatmagnetic media having high coercivity and high magnetic anisotropy. Moreparticularly, it relates to methods that reduce reflections of the laserradiation back to the TAMR structures.

2. Description of the Related Art

Magnetic recording at area data densities of between 1 and 10 Tera-bitsper in² involves the development of new magnetic recording media, newmagnetic recording heads and, most importantly, a new magnetic recordingscheme that can delay the onset of the so-called “superparamagnetic”effect. This latter effect is the thermal instability of the extremelysmall regions of magnetic material on which information must berecorded, in order to achieve the required data densities. A way ofcircumventing this thermal instability is to use magnetic recordingmedia with high magnetic anisotropy and high coercivity that can stillbe written upon by the increasingly small write heads required forproducing the high data density. This way of addressing the problemproduces two conflicting requirements:

-   1. The need for a stronger writing field that is necessitated by the    highly anisotropic and coercive magnetic media.-   2. The need for a smaller write head of sufficient definition to    produce the high areal write densities, which write heads,    disadvantageously, produce a smaller field gradient and broader    field profile.

Satisfying these requirements simultaneously may be a limiting factor inthe further development of the present magnetic recording scheme used instate of the art hard-disk-drives (HDD). If that is the case, furtherincreases in recording area density may not be achievable within thoseschemes. One way of addressing these conflicting requirements is by theuse of assisted recording methodologies, notably thermally assistedmagnetic recording, or TAMR.

Prior art forms of assisted recording methodologies being applied to theelimination of the above problem share a common feature: transferringenergy into the magnetic recording system through the use of physicalmethods that are not directly related to the magnetic field produced bythe write head. If an assisted recording scheme can produce amedium-property profile to enable low-field writing localized at thewrite field area, then even a weak write field can produce high datadensity recording because of the multiplicative effect of the spatialgradients of both the medium property profile and the write field. Theseprior art assisted recording schemes either involve deep sub-micronlocalized heating by an optical beam or ultra-high frequency AC magneticfield generation.

The heating effect of TAMR works by raising the temperature of a smallregion of the magnetic medium to essentially its Curie temperature(T_(c)), at which temperature both its coercivity and anisotropy aresignificantly reduced and magnetic writing becomes easier to producewithin that region.

In the following, we will address our attention to a particularimplementation of TAMR, namely by the transfer of electromagnetic energyfrom an optical frequency laser diode (LD), through an optical waveguide(WG) to a small, sub-micron sized region of a magnetic medium, eitherdirectly, or, more typically through interaction of the magnetic mediumwith the near field of a surface plasmon in a plasmon generator (PG)excited by the laser radiation. The transferred electromagnetic energythen causes the temperature of the medium to increase locally to enablethe write operation. However, in what follows, we will not eliminate thepossibility that the electromagnetic radiation may be radiation that isother than optical frequency, in which case the conditions forsuppression of reflections will have to be calculated using suitableboundary conditions at the interfaces.

As illustrated in schematic and prior art FIGS. 1( a) and 1(b), there isshown a front (x-z plane) view (1(a)) and a side (y-z plane)cross-sectional view (1(b)) displaying only the optical architecture ofa TAMR device. It is understood that a magnetic write pole is locatedadjacent to this optical architecture (see (31) in FIG. 1( b)) so that amagnetic write field can be applied to the thermally heated spot on therecording medium.

Referring to the Cartesian coordinates in FIG. 1( a), the ABS plane(160) of the slider (20) is the x-y plane. The slider contains theread/write transducer elements ((30) in FIG. 1( b)) and its ABS surfaceis aerodynamically structured to fly over a rotating magnetic recordingmedium.

Returning to FIG. 1( a), there is shown the laser diode (300) affixed toa submount (40), with the combination being mounted on the back sidesurface (90) of the slider. The active portion of the laser diode is aFabry-Perot-type resonant cavity (350). The bottom surface of the laserdiode cavity, denoted its exit facet, couples to the top surface (52) ofa waveguide (500). The waveguide passes through the slider, from theback end surface (150) of the slider, to its ABS (160) end, where thewaveguide terminates. We note that a portion of the ABS end of thewaveguide will generally also interface with and couple to an adjacentplasmon generator (see (32) in FIG. 1( b)) which absorbs electromagneticenergy from the waveguide mode and generates surface plasmons. Thenear-field of these plasmons can focus energy within a spot size on therecording medium that is not diffraction limited, as the laser radiationalone would be. Further details of the plasmon generator structure,other than its orientation relative to the waveguide, are not discussedin this disclosure but for the purposes of the description of this andsubsequent figures, the plasmon generator may be considered as being infront of and immediately adjacent to the the ABS end of the waveguide,as will be indicated by (32) in FIG. 1 (b).

Referring to FIG. 1( b), there is shown a side cross-sectional view ofthe slider in FIG. 1( a), which is formed on a substrate (15) of AlTiC.There is also shown the side view of the laser diode (300), and thewaveguide (500), which terminates in the ABS within the read/writetransducer region (30). Within (30), there is also shown the relativepositions of the writer (31), the reader (33) and the plasmon generator(32), the generator being situated between the writer (31) and thewaveguide (500) and is adjacent to the ABS end of the waveguide (500). Aportion of the rotating magnetic recording medium (70) is shown beneaththe ABS. It is noted that the writer (31) essentially comprises aninductively driven magnetic write pole and it will be indicated simplyas such a pole in FIG. 6, below.

The waveguide structure (500) illustrated in FIGS. 1( a) and 1(b) formsan external resonance cavity which is in addition to the laser diode'sown resonance cavity (350) that supports the laser optical mode. In theillustrated configuration, the centerline (550) of the WG structure isnormal to both its end surfaces: the backside end (52) which is coupledto the laser and the ABS end (54) that terminates at the ABS of theslider. Note that the centerline (550) is equally normal to both endsurfaces of the slider.

Analysis of the TAMR action indicates that optical radiation from thelaser is reflected at three interfacial surfaces:

-   (#1): the interface between the laser exit facet and waveguide at    the back surface of the slider (the reflected radiation being shown    as a U-shaped curved arrow (62));-   (#2): the terminal surface of the WG (the reflected radiation shown    as a U-shaped arrow (64)) at the ABS end of the slider (which can    also include a plasmon generator) and;-   (#3): at the surface of the recording medium (the reflected    radiation shown as a U-shaped arrow (66)).

Following the propagation path, the laser light first passes theinterface (#1) above, which is the interface between the emitting facetof the laser diode and the inlet end of the waveguide. At thisinterface, some laser light will be reflected back into the laser cavitydue to the change in the refractive index. Laser light now couples withthe waveguide mode and propagates towards the ABS end of the slider,whereupon it passes through the interface (#2) above, which is the ABSsurface of the slider. Some light will also reflect back at thisinterface. In addition, light passing through the slider ABS across thegap between the slider ABS and the surface of the recording medium willalso reflect back from the medium surface at interface (#3).

Each of these reflected radiation components can get back into the lasercavity and cause laser mode hopping, which are changes in the laserwavelengths and corresponding changes in the laser power transferred tothese wavelengths. These unwanted variations cause changes in thetemperature of the recording medium, introduce jitter into the recordingbits and cause track-width changes to the recording process. Inaddition, the power ratio between the emitting side and the back side ofthe LD varies due to the reflected radiation which makes it verydifficult, if not impossible monitor light intensity from the back sideby means of an integrated photo-diode (PD) in order to achieve afeedback-controlled constant power output at the ABS end. Recentexperiments in furtherance of this disclosure have confirmed theexistence of back reflections for the TAMR optical architecture of FIGS.1( a) and 1(b) by measuring the quantum shifts of the lasing wavelengthswhen increasing the current to the LD.

Although the following prior arts have discussed these issues: U.S. Pat.No. 8,274,867 (Mori et al.); U.S. Pat. No. 8,238,202 (Schreck et al.)and U.S. Patent Application 2012/0257490 (Zhou), neither the methodsdisclosed nor their results are the same as those to be describedherein.

SUMMARY

It is an object of this disclosure to provide an optical-laser-drivenTAMR device in which the effects of back reflected laser light areeliminated.

It is a further object of this disclosure to provide stable laser powerto a TAMR slider as a result of eliminating back reflected light.

It is still a further object of this disclosure to reduce variations inmedia temperature that arise as a result of the adverse effects of backreflected light in a TAMR slider.

It is yet a further object of this disclosure to achieve the previousobjects while also reducing recording transition shifts due to thermalspot variations and to ultimately improve the linear density capabilityof the recording process while also reducing adjacent track interferenceresulting from laser power fluctuations.

It is yet a further object of this disclosure to achieve the precedingobjects with minimal changes in present fabrication methods,specifically by requiring only mask changes for waveguide and plasmongenerator patterning and by requiring only small angle variations thatwill still be consistent with lapping sensitivities.

These objects will be met by means of a tilted [laser/waveguide/plasmongenerator] structure (separately tilted or in various combinations), tobe shown and described in detail in FIGS. 2-10, below. In this tiltedstructure, the centerline along the optical axis (direction of radiationpropagation) of the waveguide is not perpendicular to either one or bothend surfaces of the slider (i.e., the backside surface or the ABSsurface). Additionally, the plasmon generator may or may not be tilted.Further, a laser diode (LD) is formed in which the axis of the diodecavity (350), which is typically a Fabry-Perot type cavity resonator,may also be tilted relative to its mounting surface on the backside ofthe waveguide, providing yet a further mechanism by which reflectedlight produced by the laser is prevented from reflecting back into thelaser cavity. In this way, the reflected light from these surfaces canbe completely suppressed.

Ideally, in theory, the tilted angle for the back end surface side ofthe slider, which is its interface with the LD, is chosen so that thelight reflected to the LD (see reflection arrow (62) in FIG. 1( a)),will be unable to satisfy the condition for total internal reflection(TIR) for the waveguide structure of the LD cavity, which is aFabry-Perot type cavity formed by properly cleaved crystal planes of theLD wafer. This waveguide structure is normally a ridge structure forobtaining edge-emission type laser optical radiation, so when thereflected optical radiation from the back surface of the slider passesthrough the front facet of the LD it cannot propagate through the LDcavity to interfere with the laser light that is established in thecavity resonator.

In theory, the tilted angle between the ABS surface side of the slider,which is its interface with the medium, can be chosen so that thereflected light from the ABS surface (see reflection arrow (64) in FIG.1( a)) as well as reflected light from the medium itself (see reflectionarrow (66) in FIG. 1( a)) will be unable to satisfy the condition fortotal internal reflection (TIR) within the WG in the slider ((50) inFIG. 1( a)). If this is so, the reflected light from these two surfaceswill be unable to propagate backwards through the WG channel to reachthe LD cavity and have an adverse impact. Furthermore, because of the3-dimensional WG structure and the effective mode index for the actualWG mode, even a smaller tilt angle is required than the theoreticalcritical angle in order to reduce the effects of the reflected light.

In addition, the plasmon generator structure can also be tilted toeliminate the back reflected light during the light coupling processfrom the waveguide to the plasmon generator. This reflection occurs as aresult of the change in the effective mode index along the lightpropagation direction when the plasmon generator is placed near the WGand the PG shape changes along the WG.

BRIEF DESCRIPTION OF THE DRAWINGS

The objects, features, and advantages of the present invention areunderstood within the context of the Description of the PreferredEmbodiments as set forth below. The Description of the PreferredEmbodiments is understood within the context of the accompanyingfigures, wherein:

FIGS. 1( a) and 1(b) are front 1(a) and side 1(b) schematic views of aprior art TAMR slider and its optical apparatus for transferring opticalradiation to a recording medium in which the apparatus is not tilted andradiation is reflected back into the laser cavity.

FIG. 2 is a schematic front view of a TAMR slider having a tiltedwaveguide whose centerline is not normal to either the backside or ABSsurfaces of the slider.

FIG. 3 is a schematic diagram illustrating light reflections at awaveguide-to-air interface and a waveguide-to-clad interface for thepurposes of applying Snell's Law.

FIG. 4 is a graphical indication of the relationship between the amountof total reflection and the tilt angle of a waveguide, such as thewaveguide of FIG. 2.

FIG. 5 is a schematic illustration of a TAMR slider having a waveguidethat includes a smoothly bent region that causes the ABS end of thewaveguide centerline to be tilted with respect to the normal to the ABS.

FIGS. 6( a) and 6(b) are schematic illustrations showing a front (a) andside (b) view of a waveguide and adjacent plasmon generator, where thewaveguide is tilted, but the plasmon generator is not tilted.

FIG. 7 is a schematic illustration showing a waveguide and adjacentplasmon generator, where both the waveguide and the plasmon generatorare tilted.

FIG. 8 is a schematic illustration showing a waveguide and adjacentplasmon generator, where the waveguide is not tilted but the plasmongenerator is tilted.

FIGS. 9( a) and (b) are schematic illustrations (full view (a) anddetail (b)) showing an alternative version of a straight waveguide witha tilted ABS end surface.

FIGS. 10( a) and (b) are a front and side schematic illustration showinga straight waveguide and a laser diode cavity that is tilted in the x-zplane and used to reduce back reflection into the cavity.

FIGS. 11( a) and (b) are a front and side schematic illustration showinga laser with a cavity that is tilted in the y-z plane and a straightwaveguide.

FIGS. 12( a) and (b) are schematic front and side schematic views of awaveguide structure showing its approximate dimensions in microns (μm).

DETAILED DESCRIPTION

The details of the following disclosure will be understood by firstreferring to FIG. 2, which shows, schematically, a basic TAMR sliderstructure similar to that shown in FIG. 1( a), but with the waveguide(500) now inclined relative to the vertical (z-direction) so that thecenter line (550) through the waveguide, along the light-propagationdirection, makes a uniform angle to the normal (which is thez-direction) of both the back end surface (150) of the slider and theABS surface of the slider. The tilted waveguide has the same y-zcross-section as the waveguide shown in FIG. 1( b), but both the topsurface (52), in the back end plane of the slider, and the bottomsurface (54), in the ABS plane (160) of the slider, are tilted at thesame angle to the normal (the z-axis).

Referring next to FIG. 3, there is shown a diagram schematicallyillustrating an application of Snell's Law of reflection to the backreflection of the optical laser light at the interface between thewaveguide and the ABS of the slider. The application of Snell's Lawtakes into account the fact that there are three regions of differingindices of refraction. The index of refraction of the air layer, betweenthe ABS of the slider and the surface of the recording medium, is n₀=1.The index of refraction of the external cladding of the waveguide(region immediately surrounding the waveguide) is, typically, n₁=1.65.The index of refraction of the core material filling the waveguide isn₂=2.15. From the figure it can be seen that light ray 1 is reflectedback as light ray 2 at the ABS waveguide-to-air interface (160), whereangle of reflection b equals angle of incidence a. A light ray, denoted6, is refracted into the air space. The reflected light ray 2 propagatesuntil it strikes surface (161), which is the waveguide-claddinginterface. At this interface, light ray 2 makes an angle c with thenormal to the interface. If angle c is less than the critical angle fortotal internal reflection, there will be some leakage into the claddingregion in the form of ray 3 and there will be internally reflected lightin the form of ray 5. Reflected ray 5 will strike the upper surface(150) of the waveguide and some light will refract into the claddingabove the surface. After multiple refractions, very little reflectedlight remains within the waveguide before reaching the inlet side of thewaveguide where it couples to the laser. Therefore, no reflected lightfrom the ABS interface (160) can reach the laser cavity to affect itsperformance.

Ideally, the tilt angle, a, between the waveguide centerline (550) andthe normal to the back surface side of the slider (150), where thewaveguide interfaces with the laser, is chosen so that the reflectedlight to the laser will be unable to satisfy the total internalreflection condition within the laser and will not propagate backwardsinto the laser cavity. The laser cavity is typically a ridge structurefor edge-emission type of radiation, so that when the light from theback surface of the slider (150) passes through the front facet of thelaser diode structure it cannot propagate into the cavity to interferewith the radiation mode that has been established within the cavityresonator.

By Snell's Law, the critical angle for total internal reflection intothe waveguide, θ_(cr), at the waveguide-to-clad interface (161) is givenby: θ_(cr)=sin⁻¹ (n₁/n₂)=50.1°. The incident angle, c, of thewaveguide-to-clad interface, is 90°−a−b=90°−2a>θ_(cr), so the waveguidetilt angle a should be less than about 19.9°.

However, due to the 3-dimensional waveguide structure and the effectivemode index for the actual waveguide mode, the tilt angle can be evenless than the value calculated above and the reflected light willalready be greatly reduced. Referring to FIG. 4, there is shown agraphical simulation result that plots total reflected light includingboth inlet (150) and outlet (160) interfaces. At a tilt angle ofapproximately 13°, the total reflection is only 3%. Considering thatsome of this reflection is from the inlet side of the waveguide, theamount from the outlet side is virtually completely suppressed.

Referring next to FIG. 5, there is shown an alternate embodiment inwhich only the outlet side (54) of the waveguide is tilted (i.e., thereis an angle between the normal to the ABS, which is the z-axis, and thecenterline of the waveguide at the ABS). The inlet side propagationdirection is still along the z-axis. In this case, additionalanti-reflection coatings (ARC) can be applied to the inlet side of thewaveguide to reduce the reflected light that might propagate back intothe laser cavity. The thickness of the ARC layer can be chosen to be ¼of the wavelength of the laser light in the layer so that incident andreflected rays cancel out. In addition, the transition region (560) fromthe upper portion of the waveguide whose centerline (550) is along thez-axis, to the lower portion whose centerline (560) is tilted relativeto the z-axis, can be formed as a smooth curve (shown encircled, as ans-bend) to reduce optical losses.

In addition to the various tilting mechanisms and configurations appliedto the waveguide structure itself, the plasmon generator structure,which is formed adjacent to the waveguide, can also be tilted toeliminate back-reflected optical radiation during the radiation couplingprocess between the waveguide and the plasmon generator. This reflectionoccurs due to the changing of the effective mode index along thedirection of radiation propagation in the waveguide when the plasmongenerator is placed adjacent to the waveguide as well as changes in theshape of the plasmon generator along the waveguide. The followingfigures will illustrate three configurations of waveguides and adjacentplasmon generators where the relative tilt between them eliminatesreflected light back to the laser diode.

Referring next to FIGS. 6( a) and 6(b), there are shown front 6(a) andside 6(b) cross-sectional views in which an un-tilted plasmon generator(700) is placed adjacent to the ABS end of a tilted waveguide (500)whose lower end centerline (570) is shown making an angle with thez-axis. The plasmon generator (700) is here shown schematically ashaving a truncated triangular shape that diminishes in width towards theABS (160) of the slider. The centerline of the plasmon generator (770)is vertical. A small peg (750) is placed between the truncated terminalend of the plasmon generator for purposes of concentrating the plasmonnear-field at the recording surface.

Referring to FIG. 6( b), it can be seen that the plasmon generator (700)is separated from the waveguide (500) by a region of cladding (800),that surrounds the waveguide on all sides. It can also be seen that theplasmon generator abuts the pole tip (900) of the write pole which is apart of the write element that has been shown as (31) in FIG. 1 (b).

Referring next to FIG. 7, there is shown a front schematic view of atilted centerline (550) of a waveguide (510) and an adjacent plasmongenerator (700) that is also tilted relative to the waveguide as shownby its centerline (770).

Referring next to FIG. 8, there is shown a front schematic view of astraight waveguide (500) with an adjacent tilted plasmon generator(700), as shown by its tilted centerline (770).

Referring now to FIG. 9 (a), there is shown schematically anotherapproach to eliminate back reflections into a laser diode cavity. Inthis approach, the ABS end surface (57) of the waveguide (see detail inFIG. 9 (b)) is tilted relative to the ABS surface (160) of the slider,but at the back end surface (152) of the slider, the surface (52) of thewaveguide is not tilted. Since the centerline (550) of the waveguide isperpendicular to the ABS of the slider, the light ray, 1, of thedownward propagating laser light within the waveguide reflects off thetilted end surface of the waveguide as light ray 2 and is thereafterrefracted out of the waveguide as indicated by the arrows representinglight ray 3 in FIG. 9 (b). Light ray 3 will be unable to reflectbackwards into the laser diode cavity as long as the tilt angle ofsurface (57) is sufficient.

Referring next to FIGS. 10 (a) and (b), there are shown schematically afront (a) and side (b) cross-sectional view of a straight waveguide(500) that is abutted to a laser diode having a tilted cavity (35) inthe x-z plane. With this configuration, the emitted laser radiation willenter the waveguide at (52) and, by refraction, propagate towards theABS end (160), but reflected waves from interface 2 (curved arrow (64)),that is between the ABS end of the waveguide and the air layer, andinterface 3 (curved arrow (66)), that is between the air layer and therecording medium, will be unable to couple with the reflection at theentrance interface 1 and reflect backwards into the laser cavity (35),which is effectively a tilted waveguide structure itself. The tiltedconformation of the laser diode can be achieved within the patterningstep of a laser diode wafer, in which step the waveguide and lasertilted configuration are defined. Note that the base of the laser diode,as shown in FIGS. 10( a) and 10 (b) sits flat on the backside (150) ofthe slider.

Referring to schematic FIGS. 11 (a) and (b) there are shown front andside illustrations of an embodiment in which the laser cavity (37) istilted in the y-z plane, but the waveguide (500) is not tilted. Thelaser diode is mounted on a submount whose face is also tilted. The tiltof the laser diode can be achieved by cleaving the laser diode chip.Because of the angle with which light from the laser enters the topsurface (52) of the waveguide, even though the waveguide surface is notitself tilted, the internally reflected light within the waveguide willbe unable to couple in a manner that produces a significant amount ofbackward reflected light into the laser cavity.

It is noted that the laser cavity is essentially a Fabry-Perot resonatorof proper crystal plane separation to support the lasing process. Thus,once the properly separated opposite planar crystal surfaces of thecrystallographic structural planes of the laser diode wafer aredetermined on the wafer, the planes are cleaved and the laser cavity isthereby determined. Then, if a tilted laser cavity is desired, thelateral sides of the cavity can be cleaved along chosen tilt angles andthe resultant tilted cavity can be bonded to the submount. The submountitself may be formed of silicon or the like and its bonding surfaces maybe formed by machining or tilt-lapping. Of course, it is required thatthe cavity be bonded to the submount and thereafter to the waveguide ina manner that preserves the required tilt angle.

Referring, finally, to FIGS. 12 (a) and 12 (b) there are shown schematicfront and side views of an untilted waveguide (500) for the purposes ofindicating approximate dimensions (all dimensions are shown in μm). Thewaveguide shape can be schematically broken into three continuoussections, a first section, A, of constant maximum width and of lengthbetween approximately 0 (i.e the section is not present) and 50 microns;a second section, B, of tapering width and length between approximately30 and 100 microns, and a third section, C, of constant narrowest widthbetween approximately 0.5 and 0.8 microns and length betweenapproximately 5 and 100 microns. The side view, FIG. 12 (b) shows thatthe thickness of the waveguide is approximately constant and betweenapproximately 0.3 and 0.5 microns.

The core of the waveguide can be formed of low-loss and high refractiveindex dielectrics, such as Ta₂O₅ or HfOx. Cladding surrounding thewaveguide (such cladding is understood in all previous figures) can bemade of low-loss, low refractive index dielectrics, such as Al₂O₃, SiO₂,SiON and TaSiOx.

As is understood by a person skilled in the art, the preferredembodiments of the present disclosure are illustrative of the presentdisclosure rather than being limiting of the present disclosure.Revisions and modifications may be made to methods, processes,materials, structures, and dimensions through which is formed a TAMRwrite head with an optical architecture that transfers radiation from anoptical frequency laser diode, through a waveguide and plasmongenerator, to a recording medium, wherein elements of the opticalstructure are tilted at various positions to eliminate radiationreflection back into the laser, while still providing such a TAMR writehead and its optical structure, formed in accord with the presentdisclosure as defined by the appended claims.

What is claimed is:
 1. A TAMR (thermally assisted magnetic recording)head slider, comprising: a slider substrate having a horizontal planarback end surface and a horizontal planar ABS (air bearing surface); amagnetic write element, emerging at said ABS which produces a magneticfield for writing on a magnetic recording medium rotating beneath saidhorizontal planar ABS end; a waveguide extending through said sliderfrom said slider back end surface to said slider ABS end, wherein saidwaveguide has a dielectric core and is surrounded by a dielectriccladding, wherein said waveguide propagates optical frequencyelectromagnetic radiation along a centerline direction towards saidslider ABS end, wherein said waveguide has a planar back end surfacethat is coplanar with said slider back end surface, at which back endsurface said optical frequency electromagnetic radiation couples withsaid waveguide and; wherein said waveguide has a planar ABS end, andwherein said planar ABS end lies within said slider ABS or is tiltedrelative to said slider ABS end; and wherein a laser diode source ofoptical frequency electromagnetic radiation is affixed to said planarback end surface of said slider; wherein an exit facet of said laserdiode source is electromagnetically coupled to said waveguide at saidplanar backside end of said waveguide; wherein said laser diode includesa linear resonant cavity having a central axis of symmetry, wherein saidcentral axis of symmetry of said linear resonant cavity is aligned at anangle to a normal to said backside end of said waveguide; and wherein aplasmon generator is formed between said write element and saidwaveguide; wherein said plasmon generator has a central axis of symmetryand is positioned adjacent to said waveguide at said ABS end of saidwaveguide and separated from said waveguide; wherein saidelectromagnetic radiation is coupled to a plasmon mode in said plasmongenerator; wherein said centerline direction of said waveguide at saidbackend surface of said waveguide is tilted relative to said centralaxis of symmetry of said laser diode cavity or is not tilted relativethereto; wherein said centerline direction of said waveguide is tiltedrelative to either said planar backside surface or said planar ABS orboth said surfaces, whereby; reflections of said electromagneticradiation, originating at interfacial surfaces and at regions ofradiative coupling and proceeding in a direction back towards said laserdiode are suppressed by failing to satisfy critical angle criteria setby dielectric constants of said core dielectric material and dielectriccladding material and wherein cavity modes of said laser are therebystable.
 2. The TAMR head slider of claim 1 wherein said resonant cavityfrom which said laser radiation is emitted has an axis of symmetry thatis tilted in a x-z plane at an angle to a normal to said backside end ofsaid waveguide.
 3. The TAMR head of claim 1 wherein said axis ofsymmetry of said resonant cavity of said laser diode is tilted in a y-zplane but is not tilted in an x-z plane and wherein said laser diode isaffixed to a submount having a planar bottom surface and a tilted frontface to support said laser diode and wherein said submount planar bottomsurface is affixed to said backside surface of said slider.
 4. The TAMRhead of claim 1 wherein said laser diode comprises a cavity that is aFabry-Perot resonant cavity formed by parallel crystallographic planescleaved from a laser diode wafer.
 5. The TAMR head of claim 4 whereinsaid laser diode is tilted by scribing and tilting cleavage planesforming lateral sides of said cavity.
 6. The TAMR head of claim 3wherein said submount is a silicon submount whose mounting surfaces aretilted relative to a vertical direction machining or tilt-lapping.
 7. Amethod of forming a TAMR (thermally assisted magnetic recording) headslider, comprising: providing a slider substrate having a horizontalplanar backside end surface and a horizontal planar ABS (air bearingsurface) end and including a read/write element embedded in said ABS;forming a waveguide in said slider substrate, said waveguide extendingthrough said slider from said slider backside end surface to said sliderABS end, wherein said waveguide has a dielectric core and is surroundedby a dielectric cladding, wherein said waveguide propagates opticalelectromagnetic radiation along a centerline direction towards saidslider ABS end, wherein said waveguide has a planar backside end atwhich backside end electromagnetic radiation enters said waveguide andwherein said waveguide has a planar ABS end and wherein said planar ABSend lies within said slider ABS or is tilted relative to said sliderABS; forming a laser diode source of said electromagnetic radiation andaffixing said laser diode source to said planar back end surface of saidslider, wherein said laser diode includes a cavity resonator having acentral axis of symmetry and wherein an exit facet of said laser diodesource is tilted relative to said central axis of symmetry of saidresonant cavity and abuts said planar backside end of said waveguide andis thereby optically coupled to said waveguide; forming a plasmongenerator between said write element and said waveguide wherein saidplasmon generator has a central axis of symmetry and wherein saidplasmon generator is adjacent to said waveguide at said ABS end of saidwaveguide, whereat said electromagnetic radiation in said waveguide iscoupled to a plasmon mode within said plasmon generator; wherein saidcenterline direction of said waveguide is tilted relative to either saidplanar backside surface or said planar ABS or both said surfaces,whereby; reflections of said electromagnetic radiation in a directionback towards said laser diode are suppressed and wherein cavity modes ofsaid laser are thereby stable.